SUS-55L stainless steel diaphragm valve

【Applicable gases】

Corrosive, toxic, flammable, high-purity gases (semiconductors): NF3, SiH4, BF3, SF6, Cl2, NH3, N2O, HCl, B2H6, CH3F, WF6, and other ultra-high-purity gases and gas mixtures.

【Feature 1】 Clean performance, corrosion resistance is more outstanding.

① It is difficult for the gas to stay in the valve body, and the main parts of the valve will not be functionally damaged or corroded.

② The gas purity can be guaranteed and the influence on the semiconductor quality is reduced to a minimum.

【Feature 2】 Cv value 0.35

① General flow valve for liquefied gas, also can be used for compressed gas

② The inlet and outlet threads and forms are produced according to the standard specifications specified by the customer.

【Feature 3】Special flat gasket is used.

① It can reduce the deformation of gasket caused by excessive torque.