EGPA pneumatic spigot diaphragm valve

【Applicable gases】

Corrosive, toxic, flammable, ultra-high-purity gases (semiconductors): NF3, SiH4, BF3, SF6, Cl2, NH3, N2O, HCl, B2H6, CH3F, WF6, and other ultra-high-purity gases and gas mixtures.

【Feature 1】It succeeds in reducing about 60% of dead space, cleaning performance and corrosion resistance is more outstanding.

① It is difficult for the gas to stay in the valve body, and the main parts of the valve will not be functionally damaged or corroded.

② Gas purity can be guaranteed and the impact on semiconductor quality is reduced to a minimum.

【Feature 2】 Cv value 0.4 ~ 0.6

① High flow valve for liquefied gas, also for compressed gas. It is the epoch-making product!

② The inlet and outlet threads and forms are produced by the standard specifications specified by the customer.

【Feature 3】 Special flat gasket is adopted.

 ① It can reduce the deformation of gasket caused by excessive torque.